Highlight Tech Corp.[Htc vacuum] was founded in 1997, is a vacuum technical manufacturer and vacuum total solution services provider, designs and manufactures unique thin film deposition systems , vacuum coating chambers, dispenser equipment and vacuum components for ultra-high vacuum environment process.

Htc vacuum manufacture a comprehensive range of flanges such as KF flanges series, ISO flanges series, and CF flanges series, etc. in all standard vacuum flange systems. We manufacture all series vacuum flanges in accordance with ISO standards so they could be compatible with other manufacturers’ flanges and vacuum fittings.

The ISO standard quick release flange is known by the names Quick Flange (QF), Klein Flange (KF) or NW, sometimes also as DN. The KF designation has been adopted by ISO, DIN. KF flanges are made with a chamfered back surface that are attached with a circular clamp and an elastomeric o-ring that is mounted in a metal centering ring. Standard sizes are indicated by the nominal inner diameter in millimeters for flanges 10 through 50 mm in diameter.

The typical KF or NW assembly consists of two identical flanges, a center-ring, and aluminium clamps with a wingnut fastener frequently connect and disconnect without tools.

The construction of ISO flanges series includes two smooth-faced sexless flanges clamped together with a combination metal centering ring and elastomeric O-ring between them.

The high sealing effect and the low leak rates performance of CF flanges connections is a result of gasket material. When assembling the CF Flanges connect, the knife edge is pressed into the flat copper gasket and force the seal material both axially as well as radially outwards to the flanges. The material is enclosed and cannot flow even at high bake out temperature. Due to this deformation of the seal such connections may sometimes stick together. They can be easily separated with a special tool or screwdriver.

KF Flanges - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160

Features

Specifications

ISO Flanges - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250

Features

Specifications

CF Flanges - CF16 - CF35 - CF63 - CF100 - CF150

Features

Specifications

 

 

 

Centering Ring

 

KF Centering Ring - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160

 

ISO Centering Ring - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250

The centering ring assemblies are placed between two ISO flanges with matching outer diameters. The centering ring complete with O’ring should be used when joining with any two ISO flanges with a quick clamp. They are commonly used to build fore line vacuum plumbing and process systems. Htc’s ISO centering rings have two area used size, one is U.S.A and another is Europe. Htc offer the centering rings with O’ring –Europe are used for fore line vacuum plumbing and for simple high vacuum (HV) chamber ports and they also application .vacuum industry standard for ultra-high vacuum applications.

- Centering Ring: 304 S.S. or Aluminium (Other material available upon request)

- O’ring: Viton

- Outer Ring: Aluminium
- Vacuum range : 1×10-8 Torr
- Temperature range : 150 °C(Viton) / 80 °C(NBR)

- Size: ISO63~ISO500

 

Vacuum Adaptor - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

Htc vacuum adapters mate one type of flange system to another. Adapters are available for all major systems, such as ConFlat-compatible (CF), KF, ISO and ANSI. Unless stated otherwise, all adapters are stainless steel.

Tubulated Adaptor - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160

The adapters provide a transition from one method of sealing to another. The feature of these adapters is that the geometries at each end of any component are different. This is more than a change in size within a particular sealing method. The tubulated adaptor which is flange to flange adapter fittings used as a transitions between two dissimilar flange types.

Htc offer standard tabulate adaptor with flange for KF (NW), ISO, CF and ANSI (ASA) components.
- Material: 304 S.S. (Other material available upon request)
- Vacuum range: 1×10-8 Torr
- Temperature range: -20 °C to 150 °C

 

Reducing Adaptor - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

The adapters provide a transition from one method of sealing to another. The feature of these adapters is that the geometries at each end of any component are different. This is more than a change in size within a particular sealing method. The conical reducing adaptor which is flange to flange adapter fittings used as a transition between two the same flange type or two different types flange but different size. Htc offer conical reducing adaptors have KF-KF, ISO-KF, and ISO-ISO.

- Material: 304 S.S. (Other material available upon request)
- Vacuum range: 1×10-8 Torr
- Temperature range: -20 °C to 150 °C

Vacuum Adaptor

The adapters provide a transition from one method of sealing to another. The feature of these adapters is that the geometries at each end of any component are different. This is more than a change in size within a particular sealing method. Htc‘s flange to fitting adapters allow the mating of a KF flange to a particular type of port or tubulation.

- Material: 304 S.S. (Other material available upon request)
- Vacuum range: 1×10-8 Torr
- Temperature range: -20 °C to 150 °C

Vacuum Valves

Htc is a world-wide supplier of vacuum valves, vacuum components, and vacuum chambers. All of Htc's vacuum valves are 100% leak tested. Htc is pleased to offer vacuum valves designed and manufactured in Taiwan. These valves are the result of a long and careful development program designed to insure product quality, reliability, and value. Every effort has been made to provide a valve family suited to the requirements of various users.

Htc vacuum valves will function reliably in applications ranging from semiconductor production system with chemical and particulate contamination. They can be used in rough vacuum, high vacuum (HV), or ultra-high vacuum (UHV) environment.

Htc vacuum valves have KF, ISO and ANSI port models, are designed for high vacuum applications where vacuum pressures approximate 10-9 torr and bake-out temperature do not exceed 150 ºC. Htc offers manual operated valves or pneumatic actuated with bellows attached reed sensor, include angle valves, z-inline valves, y-inline valves, and vacuum ball valves.

Angle Valves, Manual

Vacuum Angle valve is one type of the poppet valves. When the poppet is moved toward the top of the valve, the internal body cavity is open to the system, and flow is unimpeded (maximum conductance). Once the actuator moves the poppet to the bottom of the valve, an elastomer sealing ring is compressed onto the sealing surface of the lower body of the valve. This action creates a vacuum tight seal and stops the flow. Htc offers a wide variety of valve types in a comprehensive range of sizes. They are manually and pneumatically, with bellows and without bellows. Port terminations are available in KF, ISO, CF, and Tube End. Htc designs all series angle valves suited for vacuum applications with venting processes, high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

- Body: 304 S.S. (Other material available upon request)

- Poppet: 304 S.S. (Other material available upon request)

- Port ODs: 3/4 ~ 8 inch (19.05 ~ 203.2mm)

- Bellows: Welded AM-350(option)

- Seal: Viton O’ring

- Leak rate: 2×10-9 std.cc./second

- Pressure range: 2×10-9 torr to 760 torr Viton seal bonnet

- Maximum pressure before opening: 1.2 Bar
- Bake-out limitation: 150°C Viton seal bonnet

Angle Valves, Pneumatic

Vacuum Angle valve is one type of the poppet valves. When the poppet is moved toward the top of the valve, the internal body cavity is open to the system, and flow is unimpeded (maximum conductance). Once the actuator moves the poppet to the bottom of the valve, an elastomer sealing ring is compressed onto the sealing surface of the lower body of the valve. This action creates a vacuum tight seal and stops the flow. Htc offers a wide variety of valve types in a comprehensive range of sizes. They are manually and pneumatically, with bellows and without bellows. Port terminations are available in KF, ISO, CF, and Tube End. Htc designs all series angle valves suited for vacuum applications with venting processes, high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

- Body: 304 S.S. (Other material available upon request)

- Poppet: 304 S.S. (Other material available upon request)

- Port ODs: 3/4 ~ 8 inch (19.05 ~ 203.2mm)

- Bellows: Welded AM-350(option)

- Position indicator: Option

- Solenoid: Option

- Seal: Viton O’ring

- Leak rate: 2×10-9 std.cc./second

- Pressure range: 2×10-9 torr to 760 torr Viton seal bonnet

- Maximum pressure before opening: 1.2 Bar

- Operating air pressure: 4 ~ 6.5 kg/cm2

- Cycles until service: 3/4 to 2 inch (19.05 to 50.8mm) -- 500,000 times

   (Full orifice open)      2.5 to 6 inch (63.5 to 152.4mm) -- 250,000 times

                                       8 inch to larger (203.2mm to larger) -- application dependent

- Bake-out limitation: 150°C Viton seal bonnet

Ball Valves

Stainless Steel ball valves are cost effective straight through high conductance valves. Their simple, robust design provides high reliability in low vacuum applications. Ball vales are commonly used on CVD equipment downstream from the chamber or vacuum pump to isolate traps or abatement tools. A quarter-turn of the handle quickly switches the valve from open to close. Htc’s ball valves offer straight- through, unimpeded flow with minimal space requirements, and they would be applied for high pressure, high temperature environment.

- Body: 316 S.S.

- Ball: 316 S.S

- Operation: 1/4 turns manual open and close.

- Flange: KF

- Seal: Viton, PTFE

- Leak rate: 9.0×10-9  mbar-L/sec

- Max pressure:56.8 PSI

- Operating temperature: 150°C MAX

- Weight: 3/4” 0.6 KG

                 1”    1.2 KG

                 1.5” 2.8 KG

                  2”   4.4 KG

 

Bellows - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

There are two type of vacuum bellows of Htc's products. "Flexible Hoses" have concertina walls made by pressurizing a thin-wall tube. They can be bent, but not be compressed. The other type is "Flexible Bellows Connections." This type can be bent and compressed.

When possible, design the system so that the bellows make only a single bend or curve. Multiple bends concentrate stress at minimum radius points, reducing life expectancy during flexing or vibration. An elbow on one or both ends will usually eliminate multiple bends. It is difficult to make a short bellows fit between parallel flange faces that are not coaxial.

Elbows - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

Htc manufacture vacuum elbows for UHV / HV system from 304 series stainless steel. The vacuum elbows are ideal for use as roughing lines on semiconductor process equipment and for simple UHV / HV chamber ports and pump exhaust lines in semiconductor. Htc designed to fit standard and customize to your specifications.

Tees - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

Htc manufactures vacuum tees for UHV / HV systems from 304 stainless steel. The vacuum tees are ideal for use as roughing lines on semiconductor process equipment and for fore line and pump exhaust lines in semiconductor subways. Htc designed to fit standard and customize to your specifications.

Crosses - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

Htc manufacture vacuum crosses for UHV / HV system from 304 series stainless steel. The vacuum crosses are ideal for use as roughing lines on semiconductor process equipment and for simple UHV / HV chamber ports and pump exhaust lines in semiconductor. Htc designed to fit standard and customize to your specifications.

Nipples - KF16 - KF25 - KF40 - KF50 - KF63 - KF80 - KF100 - KF160 - ISO63 - ISO80 - ISO100 - ISO160 - ISO200 - ISO250 - CF16 - CF35 - CF63 - CF100 - CF150

Htc manufacture vacuum nipples for UHV / HV system from 304 series stainless steel. The vacuum nipples are ideal for use as roughing lines on semiconductor process equipment and for simple UHV / HV chamber ports and pump exhaust lines in semiconductor. Htc designed to fit standard and customize to your specifications.